Invention Grant
US07742275B2 MEMS capacitor with conductively tethered moveable capacitor plate
失效
具有导电束缚的可移动电容器板的MEMS电容器
- Patent Title: MEMS capacitor with conductively tethered moveable capacitor plate
- Patent Title (中): 具有导电束缚的可移动电容器板的MEMS电容器
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Application No.: US11848521Application Date: 2007-08-31
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Publication No.: US07742275B2Publication Date: 2010-06-22
- Inventor: Lianjun Liu
- Applicant: Lianjun Liu
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Main IPC: H01G5/00
- IPC: H01G5/00 ; H01G7/00

Abstract:
A capacitive device including at least one actuator structure formed on a substrate is provided. The capacitive device further includes a moveable structure formed on the substrate and mechanically coupled to the at least one actuator structure. The moveable structure includes a moveable capacitive plate and a bridge, formed substantially planar to the moveable capacitive plate. The bridge is used to mechanically and electrically couple the moveable capacitive plate to a signal line formed on the substrate such that the moveable capacitive plate moves up or down based on a force generated by the at least one actuator structure.
Public/Granted literature
- US20090059465A1 MEMS CAPACITOR WITH CONDUCTIVELY TETHERED MOVEABLE CAPACITOR PLATE Public/Granted day:2009-03-05
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