Invention Grant
US07742835B2 Profile control method and system therefor 有权
轮廓控制方法及其系统

Profile control method and system therefor
Abstract:
A profile control method for controlling a profile in the width direction of a sheet by using a plurality of actuators, includes calculating an envelope profile connecting local peaks of the profile; and calculating a manipulated value of each actuator with the objective of optimizing 2σ of the profile and the envelope profile.
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