Invention Grant
US07745972B2 Precise positioning apparatus 有权
精密定位装置

Precise positioning apparatus
Abstract:
A precision positioning device 1 having degrees of freedom along multi-axial directions includes a single unitary structure 2 and a plurality of expansion/contraction actuators 4a, 4b, and 4c. Movements of an object-to-be-positioned in the axial directions are effected through such elastic deformations of the unitary structure 2 as to move the object-to-be-positioned only in the axial directions. Forces to generate the elastic deformations are based on expansion/contraction of the expansion/contraction actuators 4a, 4b, and 4c incorporated in the unitary structure 2. The expansion/contraction actuators 4a, 4b, and 4c can be formed of piezoelectric elements.
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