Invention Grant
- Patent Title: Precise positioning apparatus
- Patent Title (中): 精密定位装置
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Application No.: US11886427Application Date: 2005-03-16
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Publication No.: US07745972B2Publication Date: 2010-06-29
- Inventor: Tetsunori Otaguro
- Applicant: Tetsunori Otaguro
- Applicant Address: JP
- Assignee: Hirata Corporation
- Current Assignee: Hirata Corporation
- Current Assignee Address: JP
- Agency: Bacon & Thomas, PLLC
- International Application: PCT/JP2005/004608 WO 20050316
- International Announcement: WO2006/098010 WO 20060921
- Main IPC: H01L21/68
- IPC: H01L21/68

Abstract:
A precision positioning device 1 having degrees of freedom along multi-axial directions includes a single unitary structure 2 and a plurality of expansion/contraction actuators 4a, 4b, and 4c. Movements of an object-to-be-positioned in the axial directions are effected through such elastic deformations of the unitary structure 2 as to move the object-to-be-positioned only in the axial directions. Forces to generate the elastic deformations are based on expansion/contraction of the expansion/contraction actuators 4a, 4b, and 4c incorporated in the unitary structure 2. The expansion/contraction actuators 4a, 4b, and 4c can be formed of piezoelectric elements.
Public/Granted literature
- US20090045699A1 Precise Positioning Apparatus Public/Granted day:2009-02-19
Information query
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