Invention Grant
- Patent Title: Piezoelectric actuator and method for manufacturing piezoelectric actuator
- Patent Title (中): 压电致动器及其制造方法
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Application No.: US12372114Application Date: 2009-02-17
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Publication No.: US07745981B2Publication Date: 2010-06-29
- Inventor: Shinji Omura , Koichi Hayashi , Shozo Kobayashi
- Applicant: Shinji Omura , Koichi Hayashi , Shozo Kobayashi
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2005-001679 20050106
- Main IPC: H01L41/083
- IPC: H01L41/083

Abstract:
In a method for manufacturing a piezoelectric actuator, a ceramic sintered body is prepared and a size of the ceramic sintered body is adjusted in a thickness direction defined below by grinding piezoelectric ceramic layers, included in the ceramic sintered body, located outermost in the thickness direction. In the ceramic sintered body, internal electrodes are each disposed between piezoelectric ceramic layers. The thickness direction is defined as the direction along the thickness of the piezoelectric ceramic layer. Each of the inert sections are disposed on at least one side of the active section, for driving the piezoelectric actuator, in the thickness direction. Dummy internal electrodes are arranged in the inert sections such that each of the dummy internal electrodes are each located between ceramic layers. The thickness of the piezoelectric ceramic layers disposed between the dummy internal electrodes increases with distance from the active section.
Public/Granted literature
- US20090152999A1 PIEZOELECTRIC ACTUATOR AND METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR Public/Granted day:2009-06-18
Information query
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