Invention Grant
US07746473B2 Full spectrum adaptive filtering (FSAF) for low open area endpoint detection
失效
全频谱自适应滤波（FSAF）用于低开放端点检测
- Patent Title: Full spectrum adaptive filtering (FSAF) for low open area endpoint detection
- Patent Title (中): 全频谱自适应滤波（FSAF）用于低开放端点检测
-
Application No.: US11753563Application Date: 2007-05-24
-
Publication No.: US07746473B2Publication Date: 2010-06-29
- Inventor: Mikhail Taraboukhine
- Applicant: Mikhail Taraboukhine
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: G01B9/08
- IPC: G01B9/08
Abstract:
A method for precise endpoint detection during etch processing of a substrate based on adaptive filtering of the optical emission spectrum (OES) data, even in low open area etching, is provided. Endpoint detection performed in this manner offers the benefits of increased signal-to-noise ratio and decreased computation costs and delay when compared to conventional endpoint detection techniques.
Public/Granted literature
- US20080291428A1 FULL SPECTRUM ADAPTIVE FILTERING (FSAF) FOR LOW OPEN AREA ENDPOINT DETECTION Public/Granted day:2008-11-27
Information query
