Invention Grant
US07748395B2 Wash-target holder and method for washing wash-target using the same 有权
洗涤目标支架及使用其的洗涤对象的洗涤方法

Wash-target holder and method for washing wash-target using the same
Abstract:
An object is to improve the cleanness achieved by washing through effectively suppressing the residual of solvent remained on a wash-target after washing. The present invention is a wash-target holder soaked in a wash tank by holding a wash-target, which comprises a tray for placing the wash-target, a surrounding member, which is provided standing up on a wash-target placing face of the tray, for surrounding the periphery, and a defluxion-restricting member for restricting the defluxion of the wash-target from the tray. In the periphery of the wash-target surrounded by the surrounding member, an opening for letting in and out the solvent used for washing the wash-target is formed.
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