Invention Grant
- Patent Title: Chemical delivery apparatus for CVD or ALD
- Patent Title (中): 用于CVD或ALD的化学输送装置
-
Application No.: US12500314Application Date: 2009-07-09
-
Publication No.: US07748400B2Publication Date: 2010-07-06
- Inventor: Norman Nakashima , Christophe Marcadal , Seshadri Ganguli , Paul Ma , Schubert S. Chu
- Applicant: Norman Nakashima , Christophe Marcadal , Seshadri Ganguli , Paul Ma , Schubert S. Chu
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan
- Main IPC: F16K3/36
- IPC: F16K3/36 ; F16K11/20

Abstract:
Embodiments are related to ampoule assemblies containing bypass lines and valves. In one embodiment, ampoule assembly is provided which includes inlet and outlet lines coupled with and in fluid communication to an ampoule body, a bypass line connected between the inlet and outlet lines and containing a bypass valve disposed therein. The ampoule assembly further contains a shut-off valve disposed in the inlet line between the ampoule body and a connection point of the bypass line and the inlet line, a shut-off valve disposed in the outlet line between the ampoule body and a connection point of the bypass line and the outlet line, another shut-off valve disposed in the inlet line between the ampoule body and a disconnect fitting disposed on the inlet line, and another shut-off valve disposed in the outlet line between the ampoule body and a disconnect fitting disposed on the outlet line.
Public/Granted literature
- US20090314370A1 CHEMICAL DELIVERY APPARATUS FOR CVD OR ALD Public/Granted day:2009-12-24
Information query