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US07749564B2 Method and apparatus for the production of thin film coatings 有权
用于生产薄膜涂层的方法和设备

Method and apparatus for the production of thin film coatings
Abstract:
The present disclosure provides a method for producing a coating. The method may include providing a substrate material and initiating a coating-deposition process to apply a coating material to the substrate material to produce a coating on the substrate material, wherein the coating includes a diamond-like carbon coating. The method may further include monitoring an intensity of hydrogen-alpha emission of a plasma produced during the coating-deposition process and adjusting at least one process variable of the coating-deposition process to facilitate production of the diamond-like carbon coating.
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