Invention Grant
- Patent Title: Method and apparatus for the production of thin film coatings
- Patent Title (中): 用于生产薄膜涂层的方法和设备
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Application No.: US11396116Application Date: 2006-03-31
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Publication No.: US07749564B2Publication Date: 2010-07-06
- Inventor: Bao Feng , Mahmoud Taher , Andrew G. Shull , Eric P. Carlson , Conrad C. Klepper
- Applicant: Bao Feng , Mahmoud Taher , Andrew G. Shull , Eric P. Carlson , Conrad C. Klepper
- Applicant Address: US IL Peoria
- Assignee: Caterpillar Inc.
- Current Assignee: Caterpillar Inc.
- Current Assignee Address: US IL Peoria
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner
- Main IPC: C23C16/26
- IPC: C23C16/26

Abstract:
The present disclosure provides a method for producing a coating. The method may include providing a substrate material and initiating a coating-deposition process to apply a coating material to the substrate material to produce a coating on the substrate material, wherein the coating includes a diamond-like carbon coating. The method may further include monitoring an intensity of hydrogen-alpha emission of a plasma produced during the coating-deposition process and adjusting at least one process variable of the coating-deposition process to facilitate production of the diamond-like carbon coating.
Public/Granted literature
- US20060222772A1 Method and apparatus for the production of thin film coatings Public/Granted day:2006-10-05
Information query
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