Invention Grant
- Patent Title: Cushioning material for a polishing pad
- Patent Title (中): 用于抛光垫的缓冲材料
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Application No.: US11815900Application Date: 2006-02-10
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Publication No.: US07749599B2Publication Date: 2010-07-06
- Inventor: Hiromasa Kawaguchi , Toshiaki Kimura , Takeshi Kawakami
- Applicant: Hiromasa Kawaguchi , Toshiaki Kimura , Takeshi Kawakami
- Applicant Address: JP Kanagawa
- Assignee: NHK Spring Co., Ltd.
- Current Assignee: NHK Spring Co., Ltd.
- Current Assignee Address: JP Kanagawa
- Agency: McGlew and Tuttle, P.C.
- Priority: JP2005-035818 20050214
- International Application: PCT/JP2006/302355 WO 20060210
- International Announcement: WO2006/085614 WO 20060817
- Main IPC: B32B27/08
- IPC: B32B27/08 ; B32B5/20

Abstract:
Disclosed is a cushioning material for a polishing pad, which hardly suffers swelling deformation caused by water because it is extremely low in water-absorbing characteristics and water-swelling characteristics. The cushioning material for a polishing pad includes a polyurethane foam capable of polishing even a semiconductor wafer having an undulated surface or a wafer having a local step that is formed during circuit forming process so that the undulation or step becomes smaller by uniformly polishing an entire surface of the wafer along the undulation or step. The cushioning material for a polishing pad is characterized by including a polyurethane foam obtained by reacting polyol and polyisocyanate with each other, the polyurethane foam having a contact angle with water of 90° or more. The polyurethane foam is preferably made by using hydrophobic polyol, and preferably has a self-skin layer formed thereon.
Public/Granted literature
- US20090011221A1 Cushioning Material for a Polishing Pad Public/Granted day:2009-01-08
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