Invention Grant
US07749873B2 Polycrystalline silicon layer, flat panel display using the same, and methods of fabricating the same 有权
多晶硅层,使用其的平板显示器及其制造方法

Polycrystalline silicon layer, flat panel display using the same, and methods of fabricating the same
Abstract:
A polycrystalline silicon layer, a flat panel display using the polycrystalline silicon layer, and methods of fabricating the same are provided. An amorphous silicon layer is formed on a substrate. A first pattern layer, a second pattern layer, and a metal catalyst layer are formed on the amorphous silicon layer. The first pattern layer and the second pattern layer are formed to define a region of at least 400 μm2 within which a metal catalyst of the metal catalyst layer is diffused into the amorphous silicon layer. A seed region is crystallized by the diffused metal catalyst. After a crystallization region is grown from the seed region, a semiconductor layer is formed on the crystallization region, so as to fabricate a thin film transistor with excellent characteristics. Using this, a flat panel display is fabricated.
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