Invention Grant
- Patent Title: Polycrystalline silicon layer, flat panel display using the same, and methods of fabricating the same
- Patent Title (中): 多晶硅层,使用其的平板显示器及其制造方法
-
Application No.: US11636964Application Date: 2006-12-12
-
Publication No.: US07749873B2Publication Date: 2010-07-06
- Inventor: Tae-Hoon Yang , Ki-Yong Lee , Jin-Wook Seo , Byoung-Keon Park
- Applicant: Tae-Hoon Yang , Ki-Yong Lee , Jin-Wook Seo , Byoung-Keon Park
- Applicant Address: KR Nongseo-Dong, Giheung-Gu, Yongin, Gyunggi-Do
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Nongseo-Dong, Giheung-Gu, Yongin, Gyunggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2005-0122627 20051213
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A polycrystalline silicon layer, a flat panel display using the polycrystalline silicon layer, and methods of fabricating the same are provided. An amorphous silicon layer is formed on a substrate. A first pattern layer, a second pattern layer, and a metal catalyst layer are formed on the amorphous silicon layer. The first pattern layer and the second pattern layer are formed to define a region of at least 400 μm2 within which a metal catalyst of the metal catalyst layer is diffused into the amorphous silicon layer. A seed region is crystallized by the diffused metal catalyst. After a crystallization region is grown from the seed region, a semiconductor layer is formed on the crystallization region, so as to fabricate a thin film transistor with excellent characteristics. Using this, a flat panel display is fabricated.
Public/Granted literature
- US20070131933A1 Polycrystalline silicon layer, flat panel display using the same, and methods of fabricating the same Public/Granted day:2007-06-14
Information query
IPC分类: