Invention Grant
- Patent Title: Low-cost high-performance planar back-gate CMOS
- Patent Title (中): 低成本高性能平面背栅CMOS CMOS
-
Application No.: US11877865Application Date: 2007-10-24
-
Publication No.: US07750405B2Publication Date: 2010-07-06
- Inventor: Edward J. Nowak
- Applicant: Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Anthony J. Canale
- Main IPC: H01L27/01
- IPC: H01L27/01 ; H01L27/12 ; H01L31/0392

Abstract:
A method of fabricating a high-performance planar back-gate CMOS structure having superior short-channel characteristics and reduced capacitance using processing steps that are not too lengthy or costly is provided. Also provided is a high-performance planar back-gate CMOS structure that is formed utilizing the method of the present invention. The method includes forming an opening in an upper surface of a substrate. Thereafter, a dopant region is formed in the substrate through the opening. In accordance with the inventive method, the dopant region defines a back-gate conductor of the inventive structure. Next, a front gate conductor having at least a portion thereof is formed within the opening.
Public/Granted literature
- US20080042205A1 LOW-COST HIGH-PERFORMANCE PLANAR BACK-GATE CMOS Public/Granted day:2008-02-21
Information query
IPC分类: