Invention Grant
US07750415B2 Structure and method for making high density MOSFET circuits with different height contact lines
有权
用于制造具有不同高度接触线的高密度MOSFET电路的结构和方法
- Patent Title: Structure and method for making high density MOSFET circuits with different height contact lines
- Patent Title (中): 用于制造具有不同高度接触线的高密度MOSFET电路的结构和方法
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Application No.: US11874963Application Date: 2007-10-19
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Publication No.: US07750415B2Publication Date: 2010-07-06
- Inventor: Huilong Zhu
- Applicant: Huilong Zhu
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb I.P. Law Firm, LLC
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119 ; H01L29/00

Abstract:
Embodiments herein present a structure, method, etc. for making high density MOSFET circuits with different height contact lines. The MOSFET circuits include a contact line, a first gate layer situated proximate the contact line, and at least one subsequent gate layer situated over the first gate layer. The contact line includes a height that is less than a combined height of the first gate layer and the subsequent gate layer(s). The MOSFET circuits further include gate spacers situated proximate the gate layers and a single contact line spacer situated proximate the contact line. The gate spacers are taller and thicker than the contact line spacer.
Public/Granted literature
- US20080029836A1 STRUCTURE AND METHOD FOR MAKING HIGH DENSITY MOSFET CIRCUITS WITH DIFFERENT HEIGHT CONTACT LINES Public/Granted day:2008-02-07
Information query
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