Invention Grant
US07750415B2 Structure and method for making high density MOSFET circuits with different height contact lines 有权
用于制造具有不同高度接触线的高密度MOSFET电路的结构和方法

Structure and method for making high density MOSFET circuits with different height contact lines
Abstract:
Embodiments herein present a structure, method, etc. for making high density MOSFET circuits with different height contact lines. The MOSFET circuits include a contact line, a first gate layer situated proximate the contact line, and at least one subsequent gate layer situated over the first gate layer. The contact line includes a height that is less than a combined height of the first gate layer and the subsequent gate layer(s). The MOSFET circuits further include gate spacers situated proximate the gate layers and a single contact line spacer situated proximate the contact line. The gate spacers are taller and thicker than the contact line spacer.
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