Invention Grant
- Patent Title: Dual metal interconnection
- Patent Title (中): 双金属互连
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Application No.: US11617366Application Date: 2006-12-28
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Publication No.: US07750472B2Publication Date: 2010-07-06
- Inventor: Heong Jin Kim , Sung Jin Kim
- Applicant: Heong Jin Kim , Sung Jin Kim
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Sherr & Vaughn, PLLC
- Priority: KR10-2005-0134124 20051229
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Embodiments relate to a dual metal interconnection structure of a semiconductor device and a method for manufacturing the same. In embodiments, the dual metal interconnection structure may include a contact plug selectively formed in an interlayer dielectric, which covers a silicon substrate, and contacted with an active area of the silicon substrate, a first aluminum interconnection formed on one contact plug in every two cells and having a width larger than a width of the contact plug, a dielectric wrapping an upper surface and a side plane of the first aluminum interconnection, and a second aluminum interconnection formed on one contact plug in every two cells alternatively with the first aluminum interconnection, insulated from the first aluminum interconnection by the dielectric, and having a width larger than a width of the contact plug. The dual metal interconnection structure may be formed by performing an interconnection process two times, and a width of the interconnection and a gap between interconnections may be increased.
Public/Granted literature
- US20070164436A1 DUAL METAL INTERCONNECTION Public/Granted day:2007-07-19
Information query
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