Invention Grant
- Patent Title: LSI wiring pattern for reduced deformation and cracking
- Patent Title (中): LSI布线图案,减少变形和开裂
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Application No.: US11960209Application Date: 2007-12-19
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Publication No.: US07750473B2Publication Date: 2010-07-06
- Inventor: Takamasa Usui , Hideki Shibata , Tadashi Murofushi , Masakazu Jimbo , Hiroshi Hirayama
- Applicant: Takamasa Usui , Hideki Shibata , Tadashi Murofushi , Masakazu Jimbo , Hiroshi Hirayama
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-341761 20061219
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
Provided is a semiconductor device including first and second wiring layers, and dummy and conductive patterns. The first and second wiring layers each have a hollow structure, and are stacked vertically adjacent to each other on a semiconductor substrate. The dummy pattern is formed in the first wiring layer, and does not function as a signal line. The conductive pattern is formed in the second wiring layer. The dummy and conductive patterns have an overlapping portion where these patterns overlap each other, and a non-overlapping portion where these patterns overlap each other, as viewed from above the semiconductor substrate.
Public/Granted literature
- US20080203573A1 SEMICONDUCTOR DEVICE Public/Granted day:2008-08-28
Information query
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