Invention Grant
US07750473B2 LSI wiring pattern for reduced deformation and cracking 失效
LSI布线图案,减少变形和开裂

LSI wiring pattern for reduced deformation and cracking
Abstract:
Provided is a semiconductor device including first and second wiring layers, and dummy and conductive patterns. The first and second wiring layers each have a hollow structure, and are stacked vertically adjacent to each other on a semiconductor substrate. The dummy pattern is formed in the first wiring layer, and does not function as a signal line. The conductive pattern is formed in the second wiring layer. The dummy and conductive patterns have an overlapping portion where these patterns overlap each other, and a non-overlapping portion where these patterns overlap each other, as viewed from above the semiconductor substrate.
Public/Granted literature
Information query
Patent Agency Ranking
0/0