Invention Grant
US07750484B2 Semiconductor device with flip-chip connection that uses gallium or indium as bonding material
有权
具有使用镓或铟作为接合材料的倒装芯片连接的半导体器件
- Patent Title: Semiconductor device with flip-chip connection that uses gallium or indium as bonding material
- Patent Title (中): 具有使用镓或铟作为接合材料的倒装芯片连接的半导体器件
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Application No.: US12146003Application Date: 2008-06-25
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Publication No.: US07750484B2Publication Date: 2010-07-06
- Inventor: Shigeru Mizuno , Takashi Kurihara
- Applicant: Shigeru Mizuno , Takashi Kurihara
- Applicant Address: JP Nagano-shi
- Assignee: Shinko Electric Industries Co., Ltd.
- Current Assignee: Shinko Electric Industries Co., Ltd.
- Current Assignee Address: JP Nagano-shi
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2007-167428 20070626
- Main IPC: H01L23/498
- IPC: H01L23/498

Abstract:
A method of manufacturing a semiconductor device in which a semiconductor element 10 is mounted on a substrate 20 through a flip-chip connection, includes the steps of cladding gallium as a bonding material 30 to a connecting pad 22 formed on a surface of the substrate 20, diffusing copper from the connecting pad 22 formed of the copper into the bonding material 30 through heating under vacuum, thereby bringing a state of a solid solution of the gallium and the copper, and aligning a connecting bump 12 formed on the semiconductor element 10 with the connecting pad 22 and bonding the connecting bump 12 to the connecting pad 22 through the bonding material 30 in a state of a solid solution under heating.
Public/Granted literature
- US20090001571A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2009-01-01
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