Invention Grant
US07750484B2 Semiconductor device with flip-chip connection that uses gallium or indium as bonding material 有权
具有使用镓或铟作为接合材料的倒装芯片连接的半导体器件

Semiconductor device with flip-chip connection that uses gallium or indium as bonding material
Abstract:
A method of manufacturing a semiconductor device in which a semiconductor element 10 is mounted on a substrate 20 through a flip-chip connection, includes the steps of cladding gallium as a bonding material 30 to a connecting pad 22 formed on a surface of the substrate 20, diffusing copper from the connecting pad 22 formed of the copper into the bonding material 30 through heating under vacuum, thereby bringing a state of a solid solution of the gallium and the copper, and aligning a connecting bump 12 formed on the semiconductor element 10 with the connecting pad 22 and bonding the connecting bump 12 to the connecting pad 22 through the bonding material 30 in a state of a solid solution under heating.
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