Invention Grant
- Patent Title: Polishing head testing with movable pedestal
- Patent Title (中): 抛光头测试与可移动底座
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Application No.: US11686868Application Date: 2007-03-15
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Publication No.: US07750657B2Publication Date: 2010-07-06
- Inventor: Jeffrey P Schmidt , Jay Rohde , Stacy Meyer
- Applicant: Jeffrey P Schmidt , Jay Rohde , Stacy Meyer
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials Inc.
- Current Assignee: Applied Materials Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Konrad Raynes & Victor LLP
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/26 ; G01N3/10 ; B24B49/00

Abstract:
A polishing head is tested in a test station having a pedestal for supporting a test wafer and a controllable pedestal actuator to move a pedestal central wafer support surface and a test wafer toward the polishing head. In another aspect of the present description, the test wafer may be positioned using a positioner having a first plurality of test wafer engagement members positioned around the pedestal central wafer support surface. In another aspect, the wafer position may have a second plurality of test wafer engagement members positioned around an outer wafer support surface disposed around the pedestal central wafer support surface and adapted to support a test wafer. The second plurality of test wafer engagement members may be distributed about a second circumference of the ring member, the second circumference having a wider diameter than the first circumference. Additional embodiments and aspects are described and claimed.
Public/Granted literature
- US20080227374A1 POLISHING HEAD TESTING WITH MOVABLE PEDESTAL Public/Granted day:2008-09-18
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