Invention Grant
- Patent Title: Optical flying height measurement and calibration with dual sliders
- Patent Title (中): 光学飞行高度测量和双滑块校准
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Application No.: US12097224Application Date: 2006-12-12
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Publication No.: US07751062B2Publication Date: 2010-07-06
- Inventor: Bo Liu , Zhimin Yuan , Ka Wei Ng
- Applicant: Bo Liu , Zhimin Yuan , Ka Wei Ng
- Applicant Address: SG Centro
- Assignee: Agency for Science, Technology and Research
- Current Assignee: Agency for Science, Technology and Research
- Current Assignee Address: SG Centro
- Agency: Greenberg Traurig, LLP
- Agent Franklin D. Ubell
- International Application: PCT/SG2006/000387 WO 20061212
- International Announcement: WO2007/070015 WO 20070621
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
A method for optical flying height measurement, and a flying height tester. The method the method comprises the steps of aligning a first slider and a second slider adjacent a transparent disk; varying a rotational speed of the disk relative to the first slider whereby a spacing between the first slider and the disk changes; measuring changes in a first reflected light intensity caused by interference of a light signal portion reflected from the first slider and a light signal portion reflected from a surface of the disk, wherein the rotational speed is varied over a range such that one maximum and minimum intensities pair is measured in the reflected light intensity; measuring a second reflected light intensity caused by interference of a light signal portion reflected from the second slider and a light signal portion reflected from a surface of the disk at a fixed rotational speed between the disk and the second slider; and calculate a flying height of the second slider using the measured maximum and minimum intensities pair and the measured second reflected light intensity.
Public/Granted literature
- US20090323079A1 METHOD AND TESTER FOR OPTICAL FLYING HEIGHT MEASUREMENT Public/Granted day:2009-12-31
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