Invention Grant
US07751127B2 Projection objective and method for optimizing a system aperture stop of a projection objective 有权
用于优化投影物镜的系统孔径光阑的投影目标和方法

Projection objective and method for optimizing a system aperture stop of a projection objective
Abstract:
In certain aspects, the disclosure relates to a projection objective, in particular for a microlithography exposure apparatus, serving to project an image of an object field in an object plane onto an image field in an image plane. The projection objective includes a system aperture stop and refractive and/or reflective optical elements that are arranged relative to an optical system axis. The centroid of the image field is arranged at a lateral distance from the optical system axis). The system aperture stop has an inner aperture stop border which encloses an aperture stop opening and whose shape is defined by a border contour curve. The border contour curve runs at least in part outside of a plane that spreads orthogonally to the optical system axis.
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