Invention Grant
US07751127B2 Projection objective and method for optimizing a system aperture stop of a projection objective
有权
用于优化投影物镜的系统孔径光阑的投影目标和方法
- Patent Title: Projection objective and method for optimizing a system aperture stop of a projection objective
- Patent Title (中): 用于优化投影物镜的系统孔径光阑的投影目标和方法
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Application No.: US12032010Application Date: 2008-02-15
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Publication No.: US07751127B2Publication Date: 2010-07-06
- Inventor: Karl-Heinz Schuster
- Applicant: Karl-Heinz Schuster
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G02B9/00
- IPC: G02B9/00 ; G02B3/00

Abstract:
In certain aspects, the disclosure relates to a projection objective, in particular for a microlithography exposure apparatus, serving to project an image of an object field in an object plane onto an image field in an image plane. The projection objective includes a system aperture stop and refractive and/or reflective optical elements that are arranged relative to an optical system axis. The centroid of the image field is arranged at a lateral distance from the optical system axis). The system aperture stop has an inner aperture stop border which encloses an aperture stop opening and whose shape is defined by a border contour curve. The border contour curve runs at least in part outside of a plane that spreads orthogonally to the optical system axis.
Public/Granted literature
- US20080165426A1 PROJECTION OBJECTIVE AND METHOD FOR OPTIMIZING A SYSTEM APERTURE STOP OF A PROJECTION OBJECTIVE Public/Granted day:2008-07-10
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