Invention Grant
- Patent Title: Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator
- Patent Title (中): 半导体集成电路，包括用于驱动静电致动器的电路，微机电系统和静电致动器的驱动方法
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Application No.: US11672773Application Date: 2007-02-08
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Publication No.: US07751173B2Publication Date: 2010-07-06
- Inventor: Tamio Ikehashi , Hiroaki Yamazaki
- Applicant: Tamio Ikehashi , Hiroaki Yamazaki
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-032587 20060209
- Main IPC: H01G5/00
- IPC: H01G5/00
Abstract:
A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit. The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode. The estimation circuit estimates the amount of a charge accumulated in the insulating film of the electrostatic actuator. The storage circuit stores a result of the estimation of the charge amount by the estimation circuit. The bias circuit changes, on the basis of the estimation result stored in the storage circuit, a drive voltage to drive the electrostatic actuator.
Public/Granted literature
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