Invention Grant
- Patent Title: Micromachined mass flow sensor and methods of making the same
- Patent Title (中): 微加工质量流量传感器及其制造方法
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Application No.: US11985879Application Date: 2008-04-03
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Publication No.: US07752910B2Publication Date: 2010-07-13
- Inventor: Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
- Applicant: Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
- Applicant Address: US CA San Jose
- Assignee: Siargo, Inc.
- Current Assignee: Siargo, Inc.
- Current Assignee Address: US CA San Jose
- Agent Bo-In Lin
- Main IPC: G01F1/68
- IPC: G01F1/68
Abstract:
A mass flow sensor is supported on an N or P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range.
Public/Granted literature
- US20080271525A1 Micromachined mass flow sensor and methods of making the same Public/Granted day:2008-11-06
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