Invention Grant
US07754003B2 Coating composition and low dielectric siliceous material produced by using same 有权
涂料组合物和使用相同的低介电硅质材料

  • Patent Title: Coating composition and low dielectric siliceous material produced by using same
  • Patent Title (中): 涂料组合物和使用相同的低介电硅质材料
  • Application No.: US10565429
    Application Date: 2004-08-04
  • Publication No.: US07754003B2
    Publication Date: 2010-07-13
  • Inventor: Tomoko AokiHiroyuki Aoki
  • Applicant: Tomoko AokiHiroyuki Aoki
  • Applicant Address: US NJ Somerville
  • Assignee: AZ Electronic Materials USA Corp.
  • Current Assignee: AZ Electronic Materials USA Corp.
  • Current Assignee Address: US NJ Somerville
  • Agent Alan Kass; Sangya Jain
  • Priority: JP2003-292529 20030812
  • International Application: PCT/JP2004/011135 WO 20040804
  • International Announcement: WO2005/014743 WO 20050217
  • Main IPC: C09D183/00
  • IPC: C09D183/00 B32B9/00
Coating composition and low dielectric siliceous material produced by using same
Abstract:
The present invention provides a coating composition, which can simply produce a porous siliceous film having excellent mechanical strength and, at the same time, possessing a stable very low level of dielectric and good chemical resistance to various chemicals, and to provide a process for producing a siliceous material using the same. The coating composition according to the present invention comprises a polyalkylsilazane compound, an acetoxysilane compound, an organic solvent, and, if necessary, a pore forming material. The present invention also provides a siliceous material produced by firing the coating composition and a process for producing the same.
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