Invention Grant
- Patent Title: Polishing pad containing embedded liquid microelements and method of manufacturing the same
- Patent Title (中): 含有嵌入液体微量元素的抛光垫及其制造方法
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Application No.: US11350951Application Date: 2006-02-10
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Publication No.: US07754118B2Publication Date: 2010-07-13
- Inventor: Hyun Huh , Sang-Mok Lee , Kee-Cheon Song , Seung-geun Kim , Do-Kwon Son
- Applicant: Hyun Huh , Sang-Mok Lee , Kee-Cheon Song , Seung-geun Kim , Do-Kwon Son
- Agency: Park Law Firm
- Agent John K. Park
- Priority: KR10-2002-0056480 20020917; KR10-2002-0077893 20021209
- Main IPC: B29C71/00
- IPC: B29C71/00

Abstract:
A polishing pad is provided. The polishing pad includes a polishing layer composed of a polymeric matrix and liquid microelements embedded in the polymeric matrix. Open pores defined by the embedded liquid microelements are distributed across a surface of the polishing layer. Due to the microstructural open pores uniformly distributed across a surface of the polishing pad, a polishing operation can be performed at high precision. The polishing pad shows constant polishing performance during the polishing operation, can be stably used, and does not cause a wafer to be scratched. In addition, a method of manufacturing the polishing pad is provided. Since all components used to manufacture the polishing pad are in a liquid phase, manufacturing can be easily performed.
Public/Granted literature
- US20060125133A1 Polishing pad containing embedded liquid microelements and method of manufacturing the same Public/Granted day:2006-06-15
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