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US07754136B2 Method for manufacturing surface acoustic wave device 失效
声表面波装置的制造方法

Method for manufacturing surface acoustic wave device
Abstract:
A method for manufacturing a surface acoustic wave device comprises depositing a detecting material layer on a substrate, forming a predetermined pattern on the detecting material layer using a nanoimprint method to obtain a detecting film with a predetermined pattern formed thereon, and forming an input interdigital transducer and an output interdigital transducer on two opposite sides of the detecting material layer on the substrate, thus obtaining a surface acoustic wave device comprising the detecting film.
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