Invention Grant
- Patent Title: Photo mask having assist pattern and method of fabricating the same
- Patent Title (中): 具有辅助图案的光罩及其制造方法
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Application No.: US11821762Application Date: 2007-06-25
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Publication No.: US07754398B2Publication Date: 2010-07-13
- Inventor: Hee-bom Kim , Jeung-woo Lee , Sung-min Huh
- Applicant: Hee-bom Kim , Jeung-woo Lee , Sung-min Huh
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Mills & Onello, LLP
- Priority: KR10-2006-0101024 20061017
- Main IPC: G03F1/00
- IPC: G03F1/00

Abstract:
A photomask has highly reliable assist patterns, and a method of fabricating the same is provided. The photomask includes a transparent substrate, circuit pattern and assist patterns. The circuit pattern recessed into the transparent substrate relative to a surface thereof has a first thickness, and assist patterns located adjacent to, and spaced apart from, the circuit pattern are recessed into the transparent substrate relative to the surface thereof while having a second thickness less than the first thickness.
Public/Granted literature
- US20080090156A1 Photo mask having assist pattern and method of fabricating the same Public/Granted day:2008-04-17
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