Invention Grant
- Patent Title: Antireflective coating compositions
- Patent Title (中): 防反射涂料组合物
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Application No.: US11456868Application Date: 2006-07-12
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Publication No.: US07754414B2Publication Date: 2010-07-13
- Inventor: Joseph E. Oberlander
- Applicant: Joseph E. Oberlander
- Applicant Address: US NJ Somerville
- Assignee: AZ Electronic Materials USA Corp.
- Current Assignee: AZ Electronic Materials USA Corp.
- Current Assignee Address: US NJ Somerville
- Agent Alan Kass; Sangya Jain
- Main IPC: G03C1/00
- IPC: G03C1/00 ; G03F1/00
Abstract:
Antireflective coating compositions with reduced outgassing are disclosed.
Public/Granted literature
- US20080014529A1 ANTIREFLECTIVE COATING COMPOSITIONS Public/Granted day:2008-01-17
Information query
