Invention Grant
US07754553B2 Charge trapping memory device with two separated non-conductive charge trapping inserts and method for making the same
有权
具有两个分离的非导电电荷捕获插入物的电荷俘获存储器件及其制造方法
- Patent Title: Charge trapping memory device with two separated non-conductive charge trapping inserts and method for making the same
- Patent Title (中): 具有两个分离的非导电电荷捕获插入物的电荷俘获存储器件及其制造方法
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Application No.: US12004943Application Date: 2007-12-20
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Publication No.: US07754553B2Publication Date: 2010-07-13
- Inventor: Yen-Hao Shih
- Applicant: Yen-Hao Shih
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Stout, Uxa, Buyan & Mullins, LLP
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A charge trapping memory device with two separated non-conductive charge trapping inserts is disclosed. The charge trapping memory device has a silicon substrate with two junctions. A gate oxide (GOX) is formed on top of the silicon substrate and between the two junctions. A polysilicon gate is defined over the GOX. A layer of bottom oxide (BOX) is grown on top of the silicon substrate and a conformal layer of top oxide (TOX) is grown along the bottom and the sidewalls of the polysilicon gate. Two charge trapping inserts are located beside the GOX and between the BOX and the TOX. The polysilicon gate needs to be at least partially over each of the two charge trapping inserts. The charge trapping inserts are made from a non-conductive charge trapping material. A method for fabricating such a device is also described.
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