Invention Grant
- Patent Title: Semiconductor device preventing electrical short and method of manufacturing the same
- Patent Title (中): 防止电气短路的半导体装置及其制造方法
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Application No.: US12401145Application Date: 2009-03-10
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Publication No.: US07754596B2Publication Date: 2010-07-13
- Inventor: Byung-jun Park
- Applicant: Byung-jun Park
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Mills & Onello, LLP
- Priority: KR10-2005-0010227 20050203
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A semiconductor device capable of preventing an electrical short between contacts and their adjacent contact pads and a method of manufacturing the same are provided. A first interlayer insulating layer is formed on the semiconductor substrate including the active region. Contact pads pass through the first interlayer insulating layer and contact with the active region. Contacts are formed on the contact pads and are connected to a conductive layer disposed above the contacts. The contact pads have a height lower than a top surface of the first interlayer insulating layer such that the contact pads have smaller thickness than the first interlayer insulating layer.
Public/Granted literature
- US20090176361A1 SEMICONDUCTOR DEVICE PREVENTING ELECTRICAL SHORT AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2009-07-09
Information query
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