Invention Grant
- Patent Title: Packaging apparatus of terahertz device
- Patent Title (中): 太赫兹装置的包装装置
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Application No.: US12176867Application Date: 2008-07-21
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Publication No.: US07755100B2Publication Date: 2010-07-13
- Inventor: Sang Kuk Choi , Kwang Yong Kang , Mun Cheol Paek , Min Hwan Kwak
- Applicant: Sang Kuk Choi , Kwang Yong Kang , Mun Cheol Paek , Min Hwan Kwak
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, PC
- Priority: KR10-2007-0128991 20071212
- Main IPC: H01L29/22
- IPC: H01L29/22 ; H01L33/00 ; H01L29/227 ; H01L31/0203

Abstract:
There is provided a packaging apparatus of a terahertz device, the apparatus including: a terahertz device having an active region at which terahertz wave is radiated or detected; a device substrate mounting the terahertz device whose active region is positioned at an opening region formed at the center of the device substrate, and electrically connecting the terahertz device and an external terminal to each other; a ball lens block arranged and fixed to an upper part of the terahertz device; and upper and lower cases receiving the device substrate mounted with the terahertz device therein and opening region vertical upper and lower portions of the active region of the terahertz device.
Public/Granted literature
- US20090152699A1 PACKAGING APPARATUS OF TERAHERTZ DEVICE Public/Granted day:2009-06-18
Information query
IPC分类: