Invention Grant
- Patent Title: Semiconductor device, semiconductor display device, and manufacturing method of semiconductor device
- Patent Title (中): 半导体装置,半导体显示装置及半导体装置的制造方法
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Application No.: US12073927Application Date: 2008-03-12
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Publication No.: US07755113B2Publication Date: 2010-07-13
- Inventor: Shunpei Yamazaki , Hidekazu Miyairi
- Applicant: Shunpei Yamazaki , Hidekazu Miyairi
- Applicant Address: unknown Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: unknown Atsugi-shi, Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP2007-068086 20070316; JP2007-133138 20070518
- Main IPC: H01L29/80
- IPC: H01L29/80 ; H01L31/112

Abstract:
To achieve high performance of a semiconductor integrated circuit depending on not only a microfabrication technique but also another way. In addition, to achieve low power consumption of a semiconductor integrated circuit. A semiconductor device is provided in which crystal faces and/or crystal axes of single-crystalline semiconductor layers of a first conductive MISFET and a second conductive MISFET are different. The crystal faces and/or crystal axes are arranged so that mobility of carriers flowing in channel length directions in the respective MISFETs is increased. Such a structure can increase mobility of carriers flowing through channels of the MISFETs and high speed operation of a semiconductor integrated circuit can be achieved. Further, low voltage driving becomes possible, and low power consumption can be realized.
Public/Granted literature
- US20080224274A1 Semiconductor device, semiconductor display device, and manufacturing method of semiconductor device Public/Granted day:2008-09-18
Information query
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