Invention Grant
US07755146B2 Formation of standard voltage threshold and low voltage threshold MOSFET devices
失效
形成标准电压阈值和低电压阈值MOSFET器件
- Patent Title: Formation of standard voltage threshold and low voltage threshold MOSFET devices
- Patent Title (中): 形成标准电压阈值和低电压阈值MOSFET器件
-
Application No.: US12512631Application Date: 2009-07-30
-
Publication No.: US07755146B2Publication Date: 2010-07-13
- Inventor: Mark Helm , Xianfeng Zhou
- Applicant: Mark Helm , Xianfeng Zhou
- Applicant Address: US NY Mount Kisco
- Assignee: Round Rock Research, LLC
- Current Assignee: Round Rock Research, LLC
- Current Assignee Address: US NY Mount Kisco
- Agency: Lerner, David, Littenberg, Krumholz & Mentlik, LLP
- Main IPC: H01L29/94
- IPC: H01L29/94

Abstract:
Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within wells defining the second type standard Vt devices, and each of the first and second type low Vt devices. Wells that define the locations of second type standard Vt devices are masked, and a second voltage threshold implant adjustment is performed to the wells defining the first type standard Vt devices, and each of the first and second type low Vt devices. Doped polysilicon gate stacks are then formed over the wells. Performance characteristics and control of each device Vt is controlled by regulating at least one of the first and second voltage threshold implant adjustments, and the polysilicon gate stack doping.
Public/Granted literature
- US20090286366A1 FORMATION OF STANDARD VOLTAGE THRESHOLD AND LOW VOLTAGE THRESHOLD MOSFET DEVICES Public/Granted day:2009-11-19
Information query
IPC分类: