Invention Grant
- Patent Title: MOS solid-state image pickup device and manufacturing method thereof
- Patent Title (中): MOS固体摄像装置及其制造方法
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Application No.: US11808042Application Date: 2007-06-06
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Publication No.: US07755150B2Publication Date: 2010-07-13
- Inventor: Emi Ohtsuka , Mikiya Uchida , Ryohei Miyagawa
- Applicant: Emi Ohtsuka , Mikiya Uchida , Ryohei Miyagawa
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2006-157407 20060606
- Main IPC: H01L27/14
- IPC: H01L27/14

Abstract:
An N-type epitaxial layer 115, which is formed above an N-type semiconductor substrate 114 in each of a pixel region and a peripheral circuit region; a first P-type well 1 formed above the N-type epitaxial layer 115 in the pixel region; and light receiving regions 117, which are formed within the first P-type well 1 and each of which is a component of a photodiode, are included. The peripheral circuit region includes: second P-type wells 2, which are formed from a surface 200 of the peripheral circuit region to a desired depth and each of which is a component of an N-Channel MOS transistor; an N-type well 3 which is formed from the surface 200 of the peripheral circuit region to a desired depth and which is a component of a P-Channel MOS transistor; and a third P-type well 4 which is formed so as to have such a shape as to isolate the N-type well 3 from the N-type epitaxial layer 115 and which has a higher impurity concentration than that of the first P-type well 1.
Public/Granted literature
- US20070284679A1 MOS solid-state image pickup device and manufacturing method thereof Public/Granted day:2007-12-13
Information query
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