Invention Grant
- Patent Title: Package substrate with built-in capacitor and manufacturing method thereof
-
Application No.: US12401127Application Date: 2009-03-10
-
Publication No.: US07755166B2Publication Date: 2010-07-13
- Inventor: Takashi Kariya
- Applicant: Takashi Kariya
- Applicant Address: JP Ogaki-shi
- Assignee: Ibiden Co., Ltd.
- Current Assignee: Ibiden Co., Ltd.
- Current Assignee Address: JP Ogaki-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2005-022992 20050131
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
When a package substrate with a built-in capacitor includes a first thin-film small electrode 41aa and a second thin-film small electrode 42aa that are electrically short-circuited to each other via a pinhole P in a high-dielectric layer 43, a power supply post 61a and a via hole 61b are not formed in the first thin-film small electrode 41aa, and a ground post 62a and a via hole 62b are not formed in the second thin-film small electrode 42aa, either. As a result, the short-circuited small electrodes 41aa and 42aa are electrically connected to neither a power supply line nor a ground line, and become a potential independent from a power supply potential and a ground potential. Therefore, in the thin-film capacitor 40, only the portion where the short-circuited small electrodes 41aa and 42aa sandwich the high dielectric layer 43 loses the capacitor function, and portions where other thin-film small electrodes 41a and 42a sandwich the high dielectric layer 43 maintain the capacitor function.
Public/Granted literature
- US20090175011A1 PACKAGE SUBSTRATE WITH BUILT-IN CAPACITOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2009-07-09
Information query
IPC分类: