A piezoelectric/electrostrictive film element includes a substrate, a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode. The substrate has a thin-walled diaphragm portion, and a thick portion formed around the thin-walled diaphragm portion. The lower electrode is formed on the substrate in such a manner as to extend over the thin-walled diaphragm portion and the thick portion. The piezoelectric/electrostrictive film is formed on the lower electrode. The upper electrode is provided on the piezoelectric/electrostrictive film in such a manner as to face the thin-walled diaphragm portion. The upper electrode includes an upper-electrode body portion and a connection portion. The upper-electrode body portion has a planar shape generally similar to the planar shape of the thin-walled diaphragm portion.