Invention Grant
US07755273B2 Field emission device and its method of manufacture 有权
场发射装置及其制造方法

Field emission device and its method of manufacture
Abstract:
A field emission device and its method of manufacture includes: a substrate; a plurality of cathode electrodes formed on the substrate and having slot shaped cathode holes to expose the substrate; emitters formed on the substrate exposed through each of the cathode holes and separated from both side surfaces of the cathode holes, the emitters being formed along a lengthwise direction of the cathode holes; an insulating layer formed on the substrate to cover the cathode electrodes and having insulating layer holes communicating with the cathode holes; and a plurality of gate electrodes formed on the insulating layer and having gate holes communicating with the insulating layer holes.
Public/Granted literature
Information query
Patent Agency Ranking
0/0