Invention Grant
- Patent Title: Silicon MEMS resonators
- Patent Title (中): 硅MEMS谐振器
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Application No.: US12131145Application Date: 2008-06-02
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Publication No.: US07755367B2Publication Date: 2010-07-13
- Inventor: Florian Schoen , Markus Loehndorf
- Applicant: Florian Schoen , Markus Loehndorf
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies, AG
- Current Assignee: Infineon Technologies, AG
- Current Assignee Address: DE Neubiberg
- Agency: Patterson Thuente Christensen Pedersen, P.A.
- Main IPC: G01R27/04
- IPC: G01R27/04
Abstract:
The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device includes a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed.
Public/Granted literature
- US20090295406A1 SILICON MEMS RESONATORS Public/Granted day:2009-12-03
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