Invention Grant
- Patent Title: Micro-electromechanical device
- Patent Title (中): 微机电装置
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Application No.: US12095089Application Date: 2006-11-08
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Publication No.: US07755454B2Publication Date: 2010-07-13
- Inventor: Masahiro Tanaka , Takashi Kinoshita , Keitaro Yamashita
- Applicant: Masahiro Tanaka , Takashi Kinoshita , Keitaro Yamashita
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sonnenschein Nath & Rosenthal LLP
- Priority: JP2005-342518 20051128
- International Application: PCT/JP2006/322274 WO 20061108
- International Announcement: WO2007/060838 WO 20070531
- Main IPC: H03H9/00
- IPC: H03H9/00 ; H03H9/70
Abstract:
Provided is a micro-electromechanical device capable of processing an electric signal in the high frequency region by a simple device structure. The micro-electromechanical device is formed, including an oscillator element having a plurality of electrodes disposed on a substrate and a beam facing the electrodes to oscillate by electrostatic drive. An input/output of a high frequency signal is applied to one of the combinations of the electrodes and the beam.
Public/Granted literature
- US20090039979A1 MICRO-ELECTROMECHANICAL DEVICE Public/Granted day:2009-02-12
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