Invention Grant
- Patent Title: Flip-chip flow sensor
- Patent Title (中): 倒装流量传感器
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Application No.: US11412460Application Date: 2006-04-26
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Publication No.: US07755466B2Publication Date: 2010-07-13
- Inventor: Scott E. Beck , Gilberto Morales
- Applicant: Scott E. Beck , Gilberto Morales
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Main IPC: H01C3/04
- IPC: H01C3/04

Abstract:
A flip-chip flow sensor has electrical components, such as temperature sensors and a heater, on the top of a substrate and has a channel formed in the bottom of the substrate. The channel is separated from the substrate's top by a membrane of substrate material. A fluid flowing through the channel is separated from a heater, upstream temperature sensor, downstream temperature sensor, bond pads, and wire bonds by the membrane. Heat flows through the membrane easily because the membrane is thin. As such, the electrical elements of the flow sensor, the bond pads and the wires are physically separated from a fluid flowing through the channel but can function properly because they are not thermally isolated.
Public/Granted literature
- US20070251292A1 Flip-chip flow sensor Public/Granted day:2007-11-01
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