Invention Grant
- Patent Title: Substrate exposure apparatus and illumination apparatus
- Patent Title (中): 基板曝光装置和照明装置
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Application No.: US11839863Application Date: 2007-08-16
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Publication No.: US07755741B2Publication Date: 2010-07-13
- Inventor: Yoshitada Oshida , Kazuo Kobayashi
- Applicant: Yoshitada Oshida , Kazuo Kobayashi
- Applicant Address: JP Ebina-shi
- Assignee: Hitachi Via Mechanics, Ltd.
- Current Assignee: Hitachi Via Mechanics, Ltd.
- Current Assignee Address: JP Ebina-shi
- Agency: Crowell & Moring, LLP
- Priority: JP2006-270173 20060930
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/52 ; G03B27/72

Abstract:
An illumination apparatus and an exposure apparatus that achieves higher quality exposure to light and higher operating speed even where the ratio Hx/Hy between the transverse dimension Hx and the longitudinal dimension Hy of the plane of optical modulation of a two-dimensional optical space modulator is 1.5 or above, for instance, are to be provided. The focal distance fx in an x-direction and the focal distance fy in a y-direction of a second optical system that guides light emitted from an integrator to a two-dimensional optical space modulator are made different, in a ratio of fx/fy=1.6, for instance. In this way, the number of rod lenses in the integrator can be made equal between transverse and longitudinal directions and the value of Hx/Hy can be made 2.5 by bringing the aspect ratio dx:dy of rod lenses to 1.6:1, close to 1.
Public/Granted literature
- US20080079921A1 Substrate Exposure Apparatus and Illumination Apparatus Public/Granted day:2008-04-03
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