Invention Grant
US07755877B2 Conveying method, conveyance apparatus, exposure apparatus, and device manufacturing method
失效
输送方法，输送装置，曝光装置及装置的制造方法
- Patent Title: Conveying method, conveyance apparatus, exposure apparatus, and device manufacturing method
- Patent Title (中): 输送方法，输送装置，曝光装置及装置的制造方法
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Application No.: US11147224Application Date: 2005-06-08
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Publication No.: US07755877B2Publication Date: 2010-07-13
- Inventor: Takashi Kamono
- Applicant: Takashi Kamono
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2004-175604 20040614
- Main IPC: H01L21/683
- IPC: H01L21/683
Abstract:
A method of holding an object with an electrostatic chuck and conveying the held object includes steps of measuring a property of the object concerning an electrostatic attraction force generated between the object and the electrostatic chuck; and controlling a characteristic of conveyance of the object based on a measurement result in the measuring step.
Public/Granted literature
- US20050275998A1 Conveying method, conveyance apparatus, exposure apparatus, and device manufacturing method Public/Granted day:2005-12-15
Information query
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