Invention Grant
- Patent Title: Method and apparatus for laser control in a two chamber gas discharge laser
-
Application No.: US12255347Application Date: 2008-10-21
-
Publication No.: US07756171B2Publication Date: 2010-07-13
- Inventor: Robert N. Jacques
- Applicant: Robert N. Jacques
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Gard & Kaslow LLP
- Main IPC: H01S3/13
- IPC: H01S3/13 ; H01S3/00 ; H01S3/22

Abstract:
A laser control system contains an oscillator gas chamber and an amplifier gas chamber. A first voltage input is operatively connected to deliver electrical pulses to a first pair of electrodes within the oscillator gas chamber and a second pair of electrodes within the amplifier gas chamber. An output of the gas chambers is an energy dose calculated by a trapezoidal window. A control circuit connects to the first voltage input for modifying the first voltage input. A feedback control loop communicates an output of the gas chambers to the control circuit for modifying the first voltage input.
Public/Granted literature
- US20100098122A1 Method and Apparatus for Laser Control in a Two Chamber Gas Discharge Laser Public/Granted day:2010-04-22
Information query