Invention Grant
- Patent Title: Angular velocity detecting device
- Patent Title (中): 角速度检测装置
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Application No.: US12136759Application Date: 2008-06-10
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Publication No.: US07770451B2Publication Date: 2010-08-10
- Inventor: Heewon Jeong , Yasushi Goto
- Applicant: Heewon Jeong , Yasushi Goto
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2007-164975 20070622
- Main IPC: G01P15/08
- IPC: G01P15/08

Abstract:
A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is levitated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.
Public/Granted literature
- US20090056444A1 ANGULAR VELOCITY DETECTING DEVICE Public/Granted day:2009-03-05
Information query
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