Invention Grant
- Patent Title: Optical unit and exposure apparatus having the same
- Patent Title (中): 光学单元和具有该光学单元的曝光设备
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Application No.: US11402059Application Date: 2006-04-12
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Publication No.: US07771065B2Publication Date: 2010-08-10
- Inventor: Choshoku Sai , Shigeo Sakino , Katsumi Asada , Hirohito Ito , Shinji Uchida
- Applicant: Choshoku Sai , Shigeo Sakino , Katsumi Asada , Hirohito Ito , Shinji Uchida
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2005-116586 20050414
- Main IPC: G02B5/08
- IPC: G02B5/08 ; G02B7/188 ; G02B26/08

Abstract:
An optical unit including a plate, an optical element, a fixing device for partially fixing the optical element against the plate, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to change a surface shape of the optical element. The deforming device includes poles for contacting a back face of the optical element, and actuators for driving the poles against the plate.
Public/Granted literature
- US20060232866A1 Optical unit and exposure apparatus having the same Public/Granted day:2006-10-19
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