Invention Grant
US07771065B2 Optical unit and exposure apparatus having the same 有权
光学单元和具有该光学单元的曝光设备

Optical unit and exposure apparatus having the same
Abstract:
An optical unit including a plate, an optical element, a fixing device for partially fixing the optical element against the plate, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to change a surface shape of the optical element. The deforming device includes poles for contacting a back face of the optical element, and actuators for driving the poles against the plate.
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