Invention Grant
- Patent Title: Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
- Patent Title (中): 基于垂直转盘和天花板升降机的组合的半导体制造的自动材料处理系统
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Application No.: US11652707Application Date: 2007-01-12
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Publication No.: US07771153B2Publication Date: 2010-08-10
- Inventor: Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
- Applicant: Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
- Applicant Address: JP Kyoto
- Assignee: Murata Machinery Ltd.
- Current Assignee: Murata Machinery Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Fish & Richardson P.C.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; G06F19/00

Abstract:
An Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and a vertical carousel stocker having a plurality of storage bins. The subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route running adjacent to the stocker, allowing the vehicle to access a WIP part directly from a storage bin. At least one storage bin includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the vehicle. The storage unit is partially open to allow the movable shelf to move to the second position, allowing the hoist to access a material unit directly from the shelf for subsequent transport along the track.
Public/Granted literature
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