Invention Grant
- Patent Title: Three-dimensional network for chemical mechanical polishing
- Patent Title (中): 三维网络化学机械抛光
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Application No.: US12287669Application Date: 2008-10-10
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Publication No.: US07771251B2Publication Date: 2010-08-10
- Inventor: Gregory P. Muldowney
- Applicant: Gregory P. Muldowney
- Applicant Address: US DE Newark US DE Newark
- Assignee: Rohm and Haas Electronic,Electronic Materials CMP Holding, Inc.
- Current Assignee: Rohm and Haas Electronic,Electronic Materials CMP Holding, Inc.
- Current Assignee Address: US DE Newark US DE Newark
- Agent Blake T. Biederman
- Main IPC: B24B1/00
- IPC: B24B1/00

Abstract:
The polishing pad (104) is useful for polishing at least one of magnetic, optical and semiconductor substrates (112) in the presence of a polishing medium (120). The polishing pad (104) includes a three-dimensional network of interconnected unit cells (225). The interconnected unit cells (225) are reticulated for allowing fluid flow and removal of polishing debris. A plurality of polishing elements (208, 308 and 408) form the three-dimensional network of interconnected unit cells (225). The polishing elements (208, 308 and 408) have a first end connected to a first adjacent polishing element at a first junction (209, 309 and 409) and a second end connected to a second adjacent polishing element at a second junction (209, 309 and 409) and having a cross-sectional area (222, 322 and 422) that remains within 30% between the first and the second junctions (209, 309 and 409). The polishing surface (200, 300 and 400) formed from the plurality of polishing elements (208, 308 and 408) remains consistent for multiple polishing operations.
Public/Granted literature
- US20090042490A1 Three-dimensional network for chemical mechanical polishing Public/Granted day:2009-02-12
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