Invention Grant
- Patent Title: Method and apparatus for manufacturing magnetic recording media
- Patent Title (中): 制造磁记录介质的方法和装置
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Application No.: US11475873Application Date: 2006-06-28
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Publication No.: US07771602B2Publication Date: 2010-08-10
- Inventor: Yoshiyuki Kamata , Katsuyuki Naito , Akira Kikitsu , Masatoshi Sakurai , Masahiro Oka
- Applicant: Yoshiyuki Kamata , Katsuyuki Naito , Akira Kikitsu , Masatoshi Sakurai , Masahiro Oka
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba,Showa Denko K.K.
- Current Assignee: Kabushiki Kaisha Toshiba,Showa Denko K.K.
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: JP2005-188388 20050628
- Main IPC: B05D5/12
- IPC: B05D5/12 ; B05D3/00 ; B44C1/22 ; C23F1/00

Abstract:
According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
Public/Granted literature
- US20070000861A1 Method and apparatus for manufacturing magnetic recording media Public/Granted day:2007-01-04
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