Invention Grant
- Patent Title: Plasma generating electrode and plasma reactor
- Patent Title (中): 等离子发生电极和等离子体反应器
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Application No.: US10561841Application Date: 2004-06-25
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Publication No.: US07771673B2Publication Date: 2010-08-10
- Inventor: Yukio Miyairi , Yasumasa Fujioka , Masaaki Masuda , Takeshi Sakuma , Tatsuhiko Hatano , Yoshihiro Sato , Junichi Suzuki
- Applicant: Yukio Miyairi , Yasumasa Fujioka , Masaaki Masuda , Takeshi Sakuma , Tatsuhiko Hatano , Yoshihiro Sato , Junichi Suzuki
- Applicant Address: JP Nagoya JP Tokyo
- Assignee: NGK Insulators, Ltd.,Honda Motor Co., Ltd.
- Current Assignee: NGK Insulators, Ltd.,Honda Motor Co., Ltd.
- Current Assignee Address: JP Nagoya JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2003-184092 20030627; JP2003-369886 20031030
- International Application: PCT/JP2004/009014 WO 20040625
- International Announcement: WO2005/001250 WO 20050106
- Main IPC: B01J19/08
- IPC: B01J19/08

Abstract:
A plasma generating electrode of the present invention includes a pair of unit electrodes 2, each of the pair of unit electrodes 2 including a plate-like ceramic body 19 and a conductive film 12 disposed inside the ceramic body 19 and including a plurality of protrusions 13 on a front surface, the pair of unit electrodes 2 constituting a basic unit 1 by being hierarchically layered at intervals corresponding to thickness of the protrusion 13 in a state that a plurality of spaces which are open on each end in the arrangement direction of the protrusion are formed, the basic units 1 constituting an electrode unit in which the basic units 1 are hierarchically layered at intervals corresponding to the thickness of the protrusion 13, and the plasma generating electrode being capable of generating plasma in the three-dimensionally arranged spaces V upon application of voltage between the unit electrodes 2 constituting the electrode unit. Therefore, the plasma generating electrode is capable of generating uniform and stable plasma and exhibiting excellent heat resistance.
Public/Granted literature
- US20060153750A1 Plasma generating electrode and plasma reactor Public/Granted day:2006-07-13
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