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US07771698B2 Laser-based method for growing an array of carbon nanotubes 有权
用于生长碳纳米管阵列的基于激光的方法

Laser-based method for growing an array of carbon nanotubes
Abstract:
A method for making/growing an array of carbon nanotubes includes the steps of: (a) providing a substrate; (b) forming a light absorption film made of a light absorption material on the substrate; (c) forming a catalyst film on the light absorption film; (d) introducing a mixture of a carrier gas and a carbon source gas by flowing the mixture over/across the catalyst film; (e) focusing a laser beam on the light absorption film to locally heat the catalyst to a predetermined/reaction temperature; and (f) growing an array of the carbon nanotubes from the substrate.
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