Invention Grant
US07771896B2 Patterning device, method of providing a patterning device, photolithographic apparatus and device manufacturing method
有权
图案化装置,提供图案形成装置的方法,光刻装置和装置制造方法
- Patent Title: Patterning device, method of providing a patterning device, photolithographic apparatus and device manufacturing method
- Patent Title (中): 图案化装置,提供图案形成装置的方法,光刻装置和装置制造方法
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Application No.: US11643953Application Date: 2006-12-22
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Publication No.: US07771896B2Publication Date: 2010-08-10
- Inventor: Wouter Anthon Soer , Vadim Yevgenyevich Banine , Maarten Marinus Johannes Wilhelmus Van Herpen
- Applicant: Wouter Anthon Soer , Vadim Yevgenyevich Banine , Maarten Marinus Johannes Wilhelmus Van Herpen
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G03F1/00
- IPC: G03F1/00

Abstract:
A patterning device for a photolithographic apparatus is used to form a patterned radiation beam, by imparting a cross-sectional pattern to the radiation beam during reflection from the patterning device. The patterning device comprises a layer of phase-change material that is capable of locally undergoing an induced structural phase change into respective ones of a plurality of stable and/or metastable states. Furthermore, the patterning device comprises a radiation reflective structure with periodically arranged layers adjacent to the layer of phase-change material. The radiation reflective structures do not partake in the phase changes. By locally changing the phase of the phase-change material, the reflectivity of the whole structure is modified, for example due to thickness changes in the layer of phase-change material that lead to destructive interference of different components of the reflected light or due to changes in surface roughness of the radiation reflective structure.
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