Invention Grant
US07772046B2 Semiconductor device having electrical devices mounted to IPD structure and method for shielding electromagnetic interference
有权
具有安装在IPD结构上的电气装置的半导体装置和用于屏蔽电磁干扰的方法
- Patent Title: Semiconductor device having electrical devices mounted to IPD structure and method for shielding electromagnetic interference
- Patent Title (中): 具有安装在IPD结构上的电气装置的半导体装置和用于屏蔽电磁干扰的方法
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Application No.: US12133133Application Date: 2008-06-04
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Publication No.: US07772046B2Publication Date: 2010-08-10
- Inventor: Reza A. Pagaila , Byung Tai Do , Yaojian Lin , Rui Huang
- Applicant: Reza A. Pagaila , Byung Tai Do , Yaojian Lin , Rui Huang
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agent Robert D. Atkins
- Main IPC: H01L21/58
- IPC: H01L21/58

Abstract:
A semiconductor device is made by forming an integrated passive device (IPD) structure on a substrate, mounting first and second electrical devices to a first surface of the IPD structure, depositing encapsulant over the first and second electrical devices and IPD structure, forming a shielding layer over the encapsulant, and electrically connecting the shielding layer to a conductive channel in the IPD structure. The conductive channel is connected to ground potential to isolate the first and second electrical devices from external interference. A recess can be formed in the encapsulant material between the first and second electrical devices. The shielding layer extends into the recess. An interconnect structure is formed on a second surface of the IPD structure. The interconnect structure is electrically connected to the first and second electrical devices and IPD structure. A shielding cage can be formed over the first electrical device prior to depositing encapsulant.
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