Invention Grant
- Patent Title: Specimen holding device and charged particle beam device
- Patent Title (中): 标本夹持装置和带电粒子束装置
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Application No.: US11699066Application Date: 2007-01-29
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Publication No.: US07772567B2Publication Date: 2010-08-10
- Inventor: Susumu Kato
- Applicant: Susumu Kato
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2006-047672 20060224
- Main IPC: G01F23/00
- IPC: G01F23/00 ; G21K5/08 ; G21K5/10
Abstract:
A specimen holding device has a plurality of electrodes, and a moving mechanism for moving upward and downward a part of the plurality of electrodes. Further, the moving mechanism moves the part of the plurality of electrodes downward to evacuate from a path through which a specimen is introduced. Further, the specimen holding device has a positioning member for the specimen so that the specimen is positioned after being mounted.
Public/Granted literature
- US20070210261A1 Specimen holding device and charged particle beam device Public/Granted day:2007-09-13
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